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Mechanical Properties of Silicon Based Compounds: Silicides
This book focuses on the mechanical properties of silicides for very large scale integration (VLSI) applications. It presents the fabrication process for bulk silicides and thin films, and list complete testing deformation for a variety of silicon based compounds. The author also presents dislocatio...
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Müşterek Yazar: | |
Materyal Türü: | e-Kitap |
Dil: | İngilizce |
Baskı/Yayın Bilgisi: |
Cham :
Springer International Publishing : Imprint: Springer,
2019.
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Edisyon: | 1st ed. 2019. |
Seri Bilgileri: | Engineering Materials,
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Konular: | |
Online Erişim: | Full-text access OPAC'ta görüntüle |
Özet: | This book focuses on the mechanical properties of silicides for very large scale integration (VLSI) applications. It presents the fabrication process for bulk silicides and thin films, and list complete testing deformation for a variety of silicon based compounds. The author also presents dislocation in silicides, fatigue and fracture aspects. A special chapter is given on deformation in silicides in the nano scale. Composites and alloys are also considered. |
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Fiziksel Özellikler: | XVI, 272 p. 315 illus., 12 illus. in color. online resource. |
ISBN: | 9783030225988 |
ISSN: | 1868-1212 |
DOI: | 10.1007/978-3-030-22598-8 |