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Mechanical Properties of Silicon Based Compounds: Silicides

This book focuses on the mechanical properties of silicides for very large scale integration (VLSI) applications. It presents the fabrication process for bulk silicides and thin films, and list complete testing deformation for a variety of silicon based compounds. The author also presents dislocatio...

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Bibliographic Details
Main Author: Pelleg, Joshua (Author)
Corporate Author: SpringerLink (Online service)
Format: e-Book
Language:English
Published: Cham : Springer International Publishing : Imprint: Springer, 2019.
Edition:1st ed. 2019.
Series:Engineering Materials,
Subjects:
Online Access:Full-text access
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Description
Summary:This book focuses on the mechanical properties of silicides for very large scale integration (VLSI) applications. It presents the fabrication process for bulk silicides and thin films, and list complete testing deformation for a variety of silicon based compounds. The author also presents dislocation in silicides, fatigue and fracture aspects. A special chapter is given on deformation in silicides in the nano scale. Composites and alloys are also considered.
Physical Description:XVI, 272 p. 315 illus., 12 illus. in color. online resource.
ISBN:9783030225988
ISSN:1868-1212
DOI:10.1007/978-3-030-22598-8