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Mechanical Properties of Silicon Based Compounds: Silicides
This book focuses on the mechanical properties of silicides for very large scale integration (VLSI) applications. It presents the fabrication process for bulk silicides and thin films, and list complete testing deformation for a variety of silicon based compounds. The author also presents dislocatio...
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| Format: | e-Book |
| Language: | English |
| Published: |
Cham :
Springer International Publishing :
2019.
Imprint: Springer, |
| Edition: | 1st ed. 2019. |
| Series: | Engineering Materials,
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| Online Access: | Full-text access |