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Mechanical Properties of Silicon Based Compounds: Silicides
This book focuses on the mechanical properties of silicides for very large scale integration (VLSI) applications. It presents the fabrication process for bulk silicides and thin films, and list complete testing deformation for a variety of silicon based compounds. The author also presents dislocatio...
Main Author: | |
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Corporate Author: | |
Format: | e-Book |
Language: | English |
Published: |
Cham :
Springer International Publishing :
2019.
Imprint: Springer, |
Edition: | 1st ed. 2019. |
Series: | Engineering Materials,
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Subjects: | |
Online Access: | Full-text access |
Table of Contents:
- What are the silicides
- Structure
- Fabrication
- Testing Deformation
- Dislocations in silicides
- Time Dependent Deformation - Creep in Silicides
- Fatigue in Silicides
- Fracture in Silicides
- Deformation in Nano Silicides
- The Effect of B
- Silicide Composites
- Alloying in Silicides
- Grain Size Effect on Mechanical Properties.