Mechanical Properties of Silicon Based Compounds: Silicides

This book focuses on the mechanical properties of silicides for very large scale integration (VLSI) applications. It presents the fabrication process for bulk silicides and thin films, and list complete testing deformation for a variety of silicon based compounds. The author also presents dislocatio...

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Bibliographic Details
Main Author: Pelleg, Joshua (Author)
Corporate Author: SpringerLink (Online service)
Format: e-Book
Language:English
Published: Cham : Springer International Publishing : 2019.
Imprint: Springer,
Edition:1st ed. 2019.
Series:Engineering Materials,
Subjects:
Materials > Analysis.
Materials.
Building materials.
Characterization and Analytical Technique.
Materials Engineering.
Structural Materials.
Online Access:Full-text access

Internet

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