Claeys, C., & Simoen, E. (2018). Metal Impurities in Silicon- and Germanium-Based Technologies: Origin, Characterization, Control, and Device Impact (1st ed. 2018.). Springer International Publishing. https://doi.org/10.1007/978-3-319-93925-4
Chicago Style (17th ed.) CitationClaeys, Cor, and Eddy Simoen. Metal Impurities in Silicon- and Germanium-Based Technologies: Origin, Characterization, Control, and Device Impact. 1st ed. 2018. Cham: Springer International Publishing, 2018. https://doi.org/10.1007/978-3-319-93925-4.
MLA (9th ed.) CitationClaeys, Cor, and Eddy Simoen. Metal Impurities in Silicon- and Germanium-Based Technologies: Origin, Characterization, Control, and Device Impact. 1st ed. 2018. Springer International Publishing, 2018. https://doi.org/10.1007/978-3-319-93925-4.