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Metal Impurities in Silicon- and Germanium-Based Technologies Origin, Characterization, Control, and Device Impact /
This book gives a unique review of different aspects of metallic contaminations in Si and Ge-based semiconductors. All important metals are discussed including their origin during crystal and/or device manufacturing, their fundamental properties, their characterization techniques and their impact on...
| Main Authors: | , |
|---|---|
| Corporate Author: | |
| Format: | e-Book |
| Language: | English |
| Published: |
Cham :
Springer International Publishing :
2018.
Imprint: Springer, |
| Edition: | 1st ed. 2018. |
| Series: | Springer Series in Materials Science,
270 |
| Subjects: | |
| Online Access: | Full-text access |