Metal Impurities in Silicon- and Germanium-Based Technologies Origin, Characterization, Control, and Device Impact /

This book gives a unique review of different aspects of metallic contaminations in Si and Ge-based semiconductors. All important metals are discussed including their origin during crystal and/or device manufacturing, their fundamental properties, their characterization techniques and their impact on...

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Detaylı Bibliyografya
Asıl Yazarlar: Claeys, Cor (Yazar), Simoen, Eddy (Yazar)
Müşterek Yazar: SpringerLink (Online service)
Materyal Türü: e-Kitap
Dil:İngilizce
Baskı/Yayın Bilgisi: Cham : Springer International Publishing : 2018.
Imprint: Springer,
Edisyon:1st ed. 2018.
Seri Bilgileri:Springer Series in Materials Science, 270
Konular:
Optical materials.
Telecommunication.
Semiconductors.
Electronic circuits.
Materials > Analysis.
Optical Materials.
Microwaves, RF Engineering and Optical Communications.
Electronic Circuits and Systems.
Characterization and Analytical Technique.
Online Erişim:Full-text access
İçindekiler:
  • Preface
  • Introduction
  • Basic Properties of Metals in Semiconductors
  • Sources of Metals in Si and Ge Processing
  • Characterization and Detection of Metals in Silicon and Germanium
  • Electrical Activity of Metals in Si and Ge
  • Impact of Metals on Silicon Devices and Circuits
  • Gettering and Passivation of Metals in Silicon and Germanium
  • Modeling and Simulation of Metals in Silicon and Germanium
  • Conclusions.

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