Metal Impurities in Silicon- and Germanium-Based Technologies Origin, Characterization, Control, and Device Impact /

This book gives a unique review of different aspects of metallic contaminations in Si and Ge-based semiconductors. All important metals are discussed including their origin during crystal and/or device manufacturing, their fundamental properties, their characterization techniques and their impact on...

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Bibliographic Details
Main Authors: Claeys, Cor (Author), Simoen, Eddy (Author)
Corporate Author: SpringerLink (Online service)
Format: e-Book
Language:English
Published: Cham : Springer International Publishing : 2018.
Imprint: Springer,
Edition:1st ed. 2018.
Series:Springer Series in Materials Science, 270
Subjects:
Optical materials.
Telecommunication.
Semiconductors.
Electronic circuits.
Materials > Analysis.
Optical Materials.
Microwaves, RF Engineering and Optical Communications.
Electronic Circuits and Systems.
Characterization and Analytical Technique.
Online Access:Full-text access

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Merkez Kütüphane

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