Advanced Control of Piezoelectric Micro-/Nano-Positioning Systems

This book explores emerging methods and algorithms that enable precise control of micro-/nano-positioning systems. The text describes three control strategies: hysteresis-model-based feedforward control and hysteresis-model-free feedback control based on and free from state observation. Each paradig...

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Bibliographic Details
Main Authors: Xu, Qingsong (Author), Tan, Kok Kiong (Author)
Corporate Author: SpringerLink (Online service)
Format: e-Book
Language:English
Published: Cham : Springer International Publishing : 2016.
Imprint: Springer,
Edition:1st ed. 2016.
Series:Advances in Industrial Control,
Subjects:
Control engineering.
Microtechnology.
Microelectromechanical systems.
Industrial engineering.
Production engineering.
Mechatronics.
Control and Systems Theory.
Microsystems and MEMS.
Industrial and Production Engineering.
Online Access:Full-text access

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