Self-Powered and Soft Polymer MEMS/NEMS Devices

This book explores the fabrication of soft material and biomimetic MEMS sensors, presents a review of MEMS/NEMS energy harvesters and self-powered sensors, and focuses on the recent efforts in developing flexible and wearable piezoelectric nanogenerators. It also includes a critical analysis of vari...

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Bibliographic Details
Main Authors: Kottapalli, Ajay Giri Prakash (Author), Tao, Kai (Author), Sengupta, Debarun (Author), Triantafyllou, Michael S. (Author)
Corporate Author: SpringerLink (Online service)
Format: e-Book
Language:English
Published: Cham : Springer International Publishing : 2019.
Imprint: Springer,
Edition:1st ed. 2019.
Series:SpringerBriefs in Applied Sciences and Technology,
Subjects:
Biomedical engineering.
Biomaterials.
Biotechnology.
Microtechnology.
Microelectromechanical systems.
Biomedical Engineering and Bioengineering.
Microsystems and MEMS.
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