Thermoelectrical Effect in SiC for High-Temperature MEMS Sensors

This book presents the fundamentals of the thermoelectrical effect in silicon carbide (SiC), including the thermoresistive, thermoelectric, thermocapacitive and thermoelectronic effects. It summarizes the growth of SiC, its properties and fabrication processes for SiC devices and introduces the ther...

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Bibliographic Details
Main Authors: Dinh, Toan (Author), Nguyen, Nam-Trung (Author), Dao, Dzung Viet (Author)
Corporate Author: SpringerLink (Online service)
Format: e-Book
Language:English
Published: Singapore : Springer Nature Singapore : 2018.
Imprint: Springer,
Edition:1st ed. 2018.
Series:SpringerBriefs in Applied Sciences and Technology,
Subjects:
Nanotechnology.
Microtechnology.
Microelectromechanical systems.
Condensed matter.
Microsystems and MEMS.
Condensed Matter Physics.
Online Access:Full-text access

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