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Micro Electro Mechanical Systems
This handbook volume aims to provide a comprehensive, self-contained, and authoritative reference in MEMS. It covers the theoretical and practical aspects including but not limited to sensors, actuators, RF MEMS, micro fluids and bio MEMS systems. It is particularly recommended to undergraduates, po...
Müşterek Yazar: | SpringerLink (Online service) |
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Diğer Yazarlar: | Huang, Qing-An (Editör) |
Materyal Türü: | e-Kitap |
Dil: | İngilizce |
Baskı/Yayın Bilgisi: |
Singapore :
Springer Nature Singapore : Imprint: Springer,
2018.
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Edisyon: | 1st ed. 2018. |
Seri Bilgileri: | Micro/Nano Technologies,
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Konular: | |
Online Erişim: | Full-text access OPAC'ta görüntüle |
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