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Micro Electro Mechanical Systems
This handbook volume aims to provide a comprehensive, self-contained, and authoritative reference in MEMS. It covers the theoretical and practical aspects including but not limited to sensors, actuators, RF MEMS, micro fluids and bio MEMS systems. It is particularly recommended to undergraduates, po...
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| Format: | e-Book |
| Language: | English |
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Singapore :
Springer Nature Singapore : Imprint: Springer,
2018.
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| Edition: | 1st ed. 2018. |
| Series: | Micro/Nano Technologies,
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| Online Access: | Full-text access View in OPAC |