Micro Electro Mechanical Systems

This handbook volume aims to provide a comprehensive, self-contained, and authoritative reference in MEMS. It covers the theoretical and practical aspects including but not limited to sensors, actuators, RF MEMS, micro fluids and bio MEMS systems. It is particularly recommended to undergraduates, po...

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Detaylı Bibliyografya
Müşterek Yazar: SpringerLink (Online service)
Diğer Yazarlar: Huang, Qing-An (Editör)
Materyal Türü: e-Kitap
Dil:İngilizce
Baskı/Yayın Bilgisi: Singapore : Springer Nature Singapore : 2018.
Imprint: Springer,
Edisyon:1st ed. 2018.
Seri Bilgileri:Micro/Nano Technologies,
Konular:
Mechatronics.
Microtechnology.
Microelectromechanical systems.
Electronics.
Telecommunication.
Microsystems and MEMS.
Electronics and Microelectronics, Instrumentation.
Microwaves, RF Engineering and Optical Communications.
Online Erişim:Full-text access
İçindekiler:
  • Device Physics
  • Scaling effect
  • Sensors
  • Actuators
  • RF MEMS
  • Micro fluid and bio MEMS
  • Integration techniques
  • Micro systems.

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