Micro Electro Mechanical Systems

This handbook volume aims to provide a comprehensive, self-contained, and authoritative reference in MEMS. It covers the theoretical and practical aspects including but not limited to sensors, actuators, RF MEMS, micro fluids and bio MEMS systems. It is particularly recommended to undergraduates, po...

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Bibliographic Details
Corporate Author: SpringerLink (Online service)
Other Authors: Huang, Qing-An (Editor)
Format: e-Book
Language:English
Published: Singapore : Springer Nature Singapore : 2018.
Imprint: Springer,
Edition:1st ed. 2018.
Series:Micro/Nano Technologies,
Subjects:
Mechatronics.
Microtechnology.
Microelectromechanical systems.
Electronics.
Telecommunication.
Microsystems and MEMS.
Electronics and Microelectronics, Instrumentation.
Microwaves, RF Engineering and Optical Communications.
Online Access:Full-text access
Table of Contents:
  • Device Physics
  • Scaling effect
  • Sensors
  • Actuators
  • RF MEMS
  • Micro fluid and bio MEMS
  • Integration techniques
  • Micro systems.

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