Micro and Nano Fabrication Technology

This volume focuses on the state-of-the-art micro/nanofabrication technologies for creating miniature structures with high precision. These multidisciplinary technologies include mechanical, electrical, optical, physical, and chemical methods, as well as hybrid processes, covering subtractive and ad...

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Bibliographic Details
Corporate Author: SpringerLink (Online service)
Other Authors: Yan, Jiwang (Editor)
Format: e-Book
Language:English
Published: Singapore : Springer Nature Singapore : Imprint: Springer, 2018.
Edition:1st ed. 2018.
Series:Micro/Nano Technologies,
Subjects:
Microtechnology.
Microelectromechanical systems.
Nanotechnology.
Medical sciences.
Biomedical engineering.
Microsystems and MEMS.
Health Sciences.
Biomedical Engineering and Bioengineering.
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