Nanofabrication Principles, Capabilities and Limits /

This second edition of Nanofabrication is one of the most comprehensive introductions on nanofabrication technologies and processes. A practical guide and reference, this book introduces readers to all of the developed technologies that are capable of making structures below 100nm. The principle of...

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Bibliographic Details
Main Author: Cui, Zheng (Author)
Corporate Author: SpringerLink (Online service)
Format: e-Book
Language:English
Published: Cham : Springer International Publishing : 2017.
Imprint: Springer,
Edition:2nd ed. 2017.
Subjects:
Microtechnology.
Microelectromechanical systems.
Mechanics, Applied.
Solids.
Electronic circuits.
Electrodynamics.
Microsystems and MEMS.
Solid Mechanics.
Electronic Circuits and Systems.
Classical Electrodynamics.
Online Access:Full-text access
Description
Summary:This second edition of Nanofabrication is one of the most comprehensive introductions on nanofabrication technologies and processes. A practical guide and reference, this book introduces readers to all of the developed technologies that are capable of making structures below 100nm. The principle of each technology is introduced and illustrated with minimum mathematics involved. Also analyzed are the capabilities of each technology in making sub-100nm structures, and the limits of preventing a technology from going further down the dimensional scale. This book provides readers with a toolkit that will help with any of their nanofabrication challenges.
Physical Description:XVII, 432 p. 316 illus., 50 illus. in color. online resource.
ISBN:9783319393612
DOI:10.1007/978-3-319-39361-2

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