Nanofabrication Principles, Capabilities and Limits /

This second edition of Nanofabrication is one of the most comprehensive introductions on nanofabrication technologies and processes. A practical guide and reference, this book introduces readers to all of the developed technologies that are capable of making structures below 100nm. The principle of...

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Bibliographic Details
Main Author: Cui, Zheng (Author)
Corporate Author: SpringerLink (Online service)
Format: e-Book
Language:English
Published: Cham : Springer International Publishing : 2017.
Imprint: Springer,
Edition:2nd ed. 2017.
Subjects:
Microtechnology.
Microelectromechanical systems.
Mechanics, Applied.
Solids.
Electronic circuits.
Electrodynamics.
Microsystems and MEMS.
Solid Mechanics.
Electronic Circuits and Systems.
Classical Electrodynamics.
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