Nanofabrication Principles, Capabilities and Limits /

This second edition of Nanofabrication is one of the most comprehensive introductions on nanofabrication technologies and processes. A practical guide and reference, this book introduces readers to all of the developed technologies that are capable of making structures below 100nm. The principle of...

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Detaylı Bibliyografya
Yazar: Cui, Zheng (Yazar)
Müşterek Yazar: SpringerLink (Online service)
Materyal Türü: e-Kitap
Dil:İngilizce
Baskı/Yayın Bilgisi: Cham : Springer International Publishing : 2017.
Imprint: Springer,
Edisyon:2nd ed. 2017.
Konular:
Microtechnology.
Microelectromechanical systems.
Mechanics, Applied.
Solids.
Electronic circuits.
Electrodynamics.
Microsystems and MEMS.
Solid Mechanics.
Electronic Circuits and Systems.
Classical Electrodynamics.
Online Erişim:Full-text access
İçindekiler:
  • 1. Introduction
  • 2. Nanofabrication by Photons
  • 3. Nanofabrication by Electron Beam
  • 4. Nanofabrication by Ion Beam
  • 5. Nanofabrication by Scanning Probes
  • 6. Nanofabrication by Replication
  • 7. Nanoscale Pattern Transfer by Etching
  • 8. Nanoscale Pattern Transfer by Deposition
  • 9. Indirect Nanofabrication
  • 10. Nanofabrication by Self-Assembly
  • 11. Applications of Nanofabrication Technologies.

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