Outlook and Challenges of Nano Devices, Sensors, and MEMS

This book provides readers with an overview of the design, fabrication, simulation, and reliability of nanoscale semiconductor devices, MEMS, and sensors, as they serve for realizing the next-generation internet of things. The authors focus on how the nanoscale structures interact with the electrica...

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Bibliographic Details
Corporate Author: SpringerLink (Online service)
Other Authors: Li, Ting (Editor), Liu, Ziv (Editor)
Format: e-Book
Language:English
Published: Cham : Springer International Publishing : Imprint: Springer, 2017.
Edition:1st ed. 2017.
Subjects:
Electronic circuits.
Microtechnology.
Microelectromechanical systems.
Nanotechnology.
Electronic Circuits and Systems.
Microsystems and MEMS.
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