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Silicon Anodization as a Structuring Technique Literature Review, Modeling and Experiments /
Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimen...
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| Format: | e-Book |
| Language: | English |
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Wiesbaden :
Springer Fachmedien Wiesbaden : Imprint: Springer Vieweg,
2018.
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| Edition: | 1st ed. 2018. |
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| Online Access: | Full-text access View in OPAC |