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Nanofabrication Principles and Applications /
This book provides an overview of the techniques and tools of nanostructure fabrication from state-of-the-art lithography to emerging self-assembly approaches. Top-down and bottom-up methodologies along with hybrid approaches are used to illustrate the fabrication of structures including integrated...
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| Format: | e-Book |
| Language: | English |
| Published: |
Cham :
Springer International Publishing :
2016.
Imprint: Springer, |
| Edition: | 1st ed. 2016. |
| Series: | SpringerBriefs in Materials,
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| Online Access: | Full-text access |