Nanofabrication Principles and Applications /

This book provides an overview of the techniques and tools of nanostructure fabrication from state-of-the-art lithography to emerging self-assembly approaches. Top-down and bottom-up methodologies along with hybrid approaches are used to illustrate the fabrication of structures including integrated...

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Detaylı Bibliyografya
Yazar: Papadopoulos, Christo (Yazar)
Müşterek Yazar: SpringerLink (Online service)
Materyal Türü: e-Kitap
Dil:İngilizce
Baskı/Yayın Bilgisi: Cham : Springer International Publishing : 2016.
Imprint: Springer,
Edisyon:1st ed. 2016.
Seri Bilgileri:SpringerBriefs in Materials,
Konular:
Nanotechnology.
Electronics.
Semiconductors.
Nanoscience.
Electronics and Microelectronics, Instrumentation.
Nanophysics.
Online Erişim:Full-text access
İçindekiler:
  • Introduction
  • Silicon Planar Processing and Photolithography
  • Direct-write Lithography Approaches
  • Stamping Methods
  • Scanning-probe Methods
  • Natural Lithography
  • Direct-Growth and Self-assembly
  • Practical Examples and Case Studies of Nanofabrication.

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