Nanopositioning Technologies Fundamentals and Applications /

This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies...

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Detaylı Bibliyografya
Müşterek Yazar: SpringerLink (Online service)
Diğer Yazarlar: Ru, Changhai (Editör), Liu, Xinyu (Editör), Sun, Yu (Editör)
Materyal Türü: e-Kitap
Dil:İngilizce
Baskı/Yayın Bilgisi: Cham : Springer International Publishing : 2016.
Imprint: Springer,
Edisyon:1st ed. 2016.
Konular:
Microtechnology.
Microelectromechanical systems.
Electronics.
Control engineering.
Robotics.
Automation.
Engineering design.
Microsystems and MEMS.
Electronics and Microelectronics, Instrumentation.
Control, Robotics, Automation.
Engineering Design.
Online Erişim:Full-text access
Diğer Bilgiler
Özet:This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies, and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.
Fiziksel Özellikler:VI, 409 p. 279 illus., 203 illus. in color. online resource.
ISBN:9783319238531
DOI:10.1007/978-3-319-23853-1

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