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Nanopositioning Technologies Fundamentals and Applications /
This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies...
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| Other Authors: | , , |
| Format: | e-Book |
| Language: | English |
| Published: |
Cham :
Springer International Publishing :
2016.
Imprint: Springer, |
| Edition: | 1st ed. 2016. |
| Subjects: | |
| Online Access: | Full-text access |