Piezoelectric MEMS Resonators

This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research...

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Detaylı Bibliyografya
Müşterek Yazar: SpringerLink (Online service)
Diğer Yazarlar: Bhugra, Harmeet (Editör), Piazza, Gianluca (Editör)
Materyal Türü: e-Kitap
Dil:İngilizce
Baskı/Yayın Bilgisi: Cham : Springer International Publishing : Imprint: Springer, 2017.
Edisyon:1st ed. 2017.
Seri Bilgileri:Microsystems and Nanosystems,
Konular:
Electronics.
Microtechnology.
Microelectromechanical systems.
Nanotechnology.
Optical materials.
Electronics and Microelectronics, Instrumentation.
Microsystems and MEMS.
Optical Materials.
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