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Piezoelectric MEMS Resonators
This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research...
Corporate Author: | |
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Other Authors: | , |
Format: | e-Book |
Language: | English |
Published: |
Cham :
Springer International Publishing :
2017.
Imprint: Springer, |
Edition: | 1st ed. 2017. |
Series: | Microsystems and Nanosystems,
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Subjects: | |
Online Access: | Full-text access |
Internet
Full-text accessMerkez Kütüphane
Copy | UnknownBarcode |
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