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Piezoelectric MEMS Resonators

This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research...

Detaylı Bibliyografya
Müşterek Yazar:	SpringerLink (Online service)
Diğer Yazarlar:	Bhugra, Harmeet (Editör), Piazza, Gianluca (Editör)
Materyal Türü:	e-Kitap
Dil:	İngilizce
Baskı/Yayın Bilgisi:	Cham : Springer International Publishing : 2017. Imprint: Springer,
Edisyon:	1st ed. 2017.
Seri Bilgileri:	Microsystems and Nanosystems,
Konular:	Electronics. Microtechnology. Microelectromechanical systems. Nanotechnology. Optical materials. Electronics and Microelectronics, Instrumentation. Microsystems and MEMS. Optical Materials.
Online Erişim:	Full-text access

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