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Piezoelectric MEMS Resonators

This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research...

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Bibliographic Details
Corporate Author:	SpringerLink (Online service)
Other Authors:	Bhugra, Harmeet (Editor), Piazza, Gianluca (Editor)
Format:	e-Book
Language:	English
Published:	Cham : Springer International Publishing : 2017. Imprint: Springer,
Edition:	1st ed. 2017.
Series:	Microsystems and Nanosystems,
Subjects:	Electronics. Microtechnology. Microelectromechanical systems. Nanotechnology. Optical materials. Electronics and Microelectronics, Instrumentation. Microsystems and MEMS. Optical Materials.
Online Access:	Full-text access

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