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Growth and Transport in Nanostructured Materials Reactive Transport in PVD, CVD, and ALD /
This book will address the application of gas phase thin film methods, including techniques such as evaporation, sputtering, CVD, and ALD to the synthesis of materials on nanostructured and high aspect-ratio high surface area materials. We have chosen to introduce these topics and the different appl...
Yazar: | Yanguas-Gil, Angel (Yazar) |
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Müşterek Yazar: | SpringerLink (Online service) |
Materyal Türü: | e-Kitap |
Dil: | İngilizce |
Baskı/Yayın Bilgisi: |
Cham :
Springer International Publishing :
2017.
Imprint: Springer, |
Edisyon: | 1st ed. 2017. |
Seri Bilgileri: | SpringerBriefs in Materials,
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Konular: | |
Online Erişim: | Full-text access |
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