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Micro and Nano Fabrication Technology
Published 2018Table of Contents: “…Part 1 Cutting technology -- Chapter 1 Micro chiseling of retroreflective arrays -- Chapter 2 Micro milling for functional surface -- Chapter 3 Micro cylindrical turning of calcium fluoride -- Chapter 4 Nanogrooving by using multi-tip diamond tools -- Chapter 5 Elliptical vibration cutting for difficult-to-cut materials -- Chapter 6 Micro machining of roller mould for roll-to-roll manufacturing -- Chapter 7 Tool servo-driven diamond turning for structured surface -- Part 2 Abrasive/tip-based machining technology -- Chapter 8 Micro/nano texturing by ultrasonic assisted grinding -- Chapter 9 Precision grinding for functional micro-structured surface -- Chapter 10 Micro fluid jet polishing -- Chapter 11 Bonnet polishing of microstructured surface -- Chapter 12 Soft-brittle semiconductors polishing with environment-friendly slurries -- Chapter 13 Three-dimensional fabrication of micro/nanostructure using scanning probe lithography -- Part 3High-energy beam machining technology -- Chapter 14 Femtosecond laser direct writing -- Chapter 15 Laser patterning of metallic glass -- Chapter 16 Ion beam machining -- Chapter 17 Electron beam machining -- Chapter 18 Microfabrication by laser lithography combined with ion etching -- Part 4 Molding/forming/self-organization technology -- Chapter 19 Replication of Micro/Nanostructures -- Chapter 20 Precision Molding of Microstructures on Chalcogenide Glass for Infrared Optics -- Chapter 21 Press molding of hybrid Fresnel lenses for infrared applications -- Chapter 22 Microspring fabrication by anisotropic gelation -- Chapter 23 Fabrication of Metallic Nanodot Arrays -- Chapter 24 Surface micro/nano-structuring using Self-assembly of fine particles -- Part 5 Physical/chemical machining technology -- Chapter 25 Micro electrical discharge machining of hard brittle materials -- Chapter 26 Micro Electrochemical Machining -- Chapter 27 Catalytic AFM-based nanofabrication -- Chapter 28 3D Microfabrication using photocatalytic reaction -- Chapter 29 Silicon etching for multiple-height microstructures -- Chapter 30 Local wettability modification and its micro-fluidic system application.…”
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