Helium Ion Microscopy

This book covers the fundamentals of Helium Ion Microscopy (HIM) including the Gas Field Ion Source (GFIS), column and contrast formation. It also provides first hand information on nanofabrication and high resolution imaging. Relevant theoretical models and the existing simulation approaches are di...

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Bibliographic Details
Corporate Author: SpringerLink (Online service)
Other Authors: Hlawacek, Gregor (Editor), Gölzhäuser, Armin (Editor)
Format: e-Book
Language:English
Published: Cham : Springer International Publishing : 2016.
Imprint: Springer,
Edition:1st ed. 2016.
Series:NanoScience and Technology,
Subjects:
Spectrum analysis.
Surfaces (Technology).
Thin films.
Surfaces (Physics).
Microtechnology.
Microelectromechanical systems.
Spectroscopy.
Surfaces, Interfaces and Thin Film.
Surface and Interface and Thin Film.
Microsystems and MEMS.
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