Electrical Atomic Force Microscopy for Nanoelectronics

The tremendous impact of electronic devices on our lives is the result of continuous improvements of the billions of nanoelectronic components inside integrated circuits (ICs). However, ultra-scaled semiconductor devices require nanometer control of the many parameters essential for their fabricatio...

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Bibliographic Details
Corporate Author: SpringerLink (Online service)
Other Authors: Celano, Umberto (Editor)
Format: e-Book
Language:English
Published: Cham : Springer International Publishing : Imprint: Springer, 2019.
Edition:1st ed. 2019.
Series:NanoScience and Technology,
Subjects:
Spectrum analysis.
Materials > Analysis.
Electronics.
Optical materials.
Nanoscience.
Nanotechnology.
Spectroscopy.
Characterization and Analytical Technique.
Electronics and Microelectronics, Instrumentation.
Optical Materials.
Nanophysics.
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