Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting

This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This fabrication technology has been systematically investigated by using experimental...

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Detaylı Bibliyografya
Yazar: Zhang, Xiao-Sheng (Yazar)
Müşterek Yazar: SpringerLink (Online service)
Materyal Türü: e-Kitap
Dil:İngilizce
Baskı/Yayın Bilgisi: Berlin, Heidelberg : Springer Berlin Heidelberg : 2016.
Imprint: Springer,
Edisyon:1st ed. 2016.
Seri Bilgileri:Springer Theses, Recognizing Outstanding Ph.D. Research,
Konular:
Microtechnology.
Microelectromechanical systems.
Energy harvesting.
Electronics.
Nanotechnology.
Microsystems and MEMS.
Energy Harvesting.
Electronics and Microelectronics, Instrumentation.
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