Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting

This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This fabrication technology has been systematically investigated by using experimental...

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Bibliographic Details
Main Author: Zhang, Xiao-Sheng (Author)
Corporate Author: SpringerLink (Online service)
Format: e-Book
Language:English
Published: Berlin, Heidelberg : Springer Berlin Heidelberg : 2016.
Imprint: Springer,
Edition:1st ed. 2016.
Series:Springer Theses, Recognizing Outstanding Ph.D. Research,
Subjects:
Microtechnology.
Microelectromechanical systems.
Energy harvesting.
Electronics.
Nanotechnology.
Microsystems and MEMS.
Energy Harvesting.
Electronics and Microelectronics, Instrumentation.
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