Silicon Anodization as a Structuring Technique Literature Review, Modeling and Experiments /

Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimen...

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Bibliographic Details
Main Author: Ivanov, Alexey (Author)
Corporate Author: SpringerLink (Online service)
Format: e-Book
Language:English
Published: Wiesbaden : Springer Fachmedien Wiesbaden : 2018.
Imprint: Springer Vieweg,
Edition:1st ed. 2018.
Subjects:
Microtechnology.
Microelectromechanical systems.
Engineering mathematics.
Engineering > Data processing.
Thermodynamics.
Heat engineering.
Heat transfer.
Mass transfer.
Microsystems and MEMS.
Mathematical and Computational Engineering Applications.
Engineering Thermodynamics, Heat and Mass Transfer.
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