Nanopositioning Technologies Fundamentals and Applications /

This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies...

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Bibliographic Details
Corporate Author: SpringerLink (Online service)
Other Authors: Ru, Changhai (Editor), Liu, Xinyu (Editor), Sun, Yu (Editor)
Format: e-Book
Language:English
Published: Cham : Springer International Publishing : 2016.
Imprint: Springer,
Edition:1st ed. 2016.
Subjects:
Microtechnology.
Microelectromechanical systems.
Electronics.
Control engineering.
Robotics.
Automation.
Engineering design.
Microsystems and MEMS.
Electronics and Microelectronics, Instrumentation.
Control, Robotics, Automation.
Engineering Design.
Online Access:Full-text access
Description
Summary:This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies, and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.
Physical Description:VI, 409 p. 279 illus., 203 illus. in color. online resource.
ISBN:9783319238531
DOI:10.1007/978-3-319-23853-1

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