Piezoelectric MEMS Resonators

This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research...

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Bibliographic Details
Corporate Author: SpringerLink (Online service)
Other Authors: Bhugra, Harmeet (Editor), Piazza, Gianluca (Editor)
Format: e-Book
Language:English
Published: Cham : Springer International Publishing : Imprint: Springer, 2017.
Edition:1st ed. 2017.
Series:Microsystems and Nanosystems,
Subjects:
Electronics.
Microtechnology.
Microelectromechanical systems.
Nanotechnology.
Optical materials.
Electronics and Microelectronics, Instrumentation.
Microsystems and MEMS.
Optical Materials.
Online Access:Full-text access
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Table of Contents:
  • AIN Thin Film Processing and Basic Properties
  • Lead Zirconate Titanate (PZT) for M/NEMS
  • Gallium Nitride for M/NEMS
  • Lithium Niobate for M/NEMS Resonators
  • Quality Factor and Coupling in Piezoelectric MEMS Resonators
  • Flexural Piezoelectric Resonators
  • Laterally Vibrating Piezoelectric MEMS Resonators
  • BAW Piezoelectric Resonators
  • Shear Piezoelectric MEMS Resonators
  • Temperature Compensation of Piezo-MEMS Resonators
  • Computational Modeling Challenges
  • Fabrication Process Flows for Implementation of Piezoelectric MEMS Resonators
  • Reliability and Quality Assessment (Stability and Packages)
  • Large Volume Testing and Calibration
  • High Frequency Oscillators for Mobile Devices
  • BAW Filters and Duplexers for Mobile Communication. .

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