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Dielectric Breakdown in Gigascale Electronics Time Dependent Failure Mechanisms /
This book focuses on the experimental and theoretical aspects of the time-dependent breakdown of advanced dielectric films used in gigascale electronics. Coverage includes the most important failure mechanisms for thin low-k films, new and established experimental techniques, recent advances in the...
Main Authors: | Borja, Juan Pablo (Author), Lu, Toh-Ming (Author), Plawsky, Joel (Author) |
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Corporate Author: | SpringerLink (Online service) |
Format: | e-Book |
Language: | English |
Published: |
Cham :
Springer International Publishing : Imprint: Springer,
2016.
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Edition: | 1st ed. 2016. |
Series: | SpringerBriefs in Materials,
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Subjects: | |
Online Access: | Full-text access View in OPAC |
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