Dielectric Breakdown in Gigascale Electronics Time Dependent Failure Mechanisms /

This book focuses on the experimental and theoretical aspects of the time-dependent breakdown of advanced dielectric films used in gigascale electronics. Coverage includes the most important failure mechanisms for thin low-k films, new and established experimental techniques, recent advances in the...

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Bibliographic Details
Main Authors: Borja, Juan Pablo (Author), Lu, Toh-Ming (Author), Plawsky, Joel (Author)
Corporate Author: SpringerLink (Online service)
Format: e-Book
Language:English
Published: Cham : Springer International Publishing : Imprint: Springer, 2016.
Edition:1st ed. 2016.
Series:SpringerBriefs in Materials,
Subjects:
Optical materials.
Microtechnology.
Microelectromechanical systems.
Electronic circuits.
Nanotechnology.
Optical Materials.
Microsystems and MEMS.
Electronic Circuits and Systems.
Online Access:Full-text access
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Table of Contents:
  • Introduction
  • General Theories
  • Measurement Tools and Test Structures
  • Experimental Techniques
  • Breakdown Experiments
  • Kinetics of Charge Carrier Confinement in Thin Dielectrics
  • Theory of Dielectric Breakdown in Nanoporous Thin Films
  • Dielectric Breakdown in Copper Interconnects
  • Reconsidering Conventional Models.

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